Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-01-11
2005-01-11
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S479000
Reexamination Certificate
active
06842254
ABSTRACT:
An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.
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Belleville Claude
Pronovost Daniel
Proulx Alain
Van Neste Richard
Connolly Patrick
Fiso Technologies Inc.
Toatley , Jr. Gregory J.
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