Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1997-10-28
2000-07-04
Meeks, Timothy
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427160, 427162, 42725524, 4272556, 250332, C23C 1600
Patent
active
060835575
ABSTRACT:
This is a system and method of forming a conductive polymer optical coating on an infrared detection system. The apparatus may include an upper vacuum chamber, a shutter assembly mounted inside the upper vacuum chamber, a substrate holder disposed inside the shutter assembly, wherein the shutter assembly is capable of shielding or exposing the substrate to the upper vacuum chamber, an orifice connected to the upper vacuum chamber for control of a flow rate for the upper vacuum chamber, a first mechanical pump system connected to the orifice, a lower vacuum chamber connected to the upper vacuum chamber on a side opposite the shutter assembly, an electron beam assembly for providing a low-melting-point electrical conductor vapor, disposed inside the lower vacuum chamber, wherein the electron beam assembly is directed toward the shutter assembly in the upper vacuum chamber, a second mechanical pump system and a cryopump connected to the lower vacuum chamber, a polymer generation chamber for providing polymer vapor, connected to the upper vacuum chamber on a side perpendicular to the shutter assembly, a vaporizer surrounding a first portion of the polymer generation chamber, a pyrolysis furnace surrounding a second portion of the polymer generation chamber, and a post pyrolysis heater surrounding a third portion of the polymer generation chamber.
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Belcher James F.
Whicker Stephen L.
Meeks Timothy
Raytheon Company
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