System and method for interferometer non-linearity compensation

Details System and method for interferometer non-linearity compensation System and method for interferometer non-linearity compensation

2005-06-01

2008-10-14

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S498000

Reexamination Certificate

active

07436519

ABSTRACT:
A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital position values. The method includes sensing whether a low velocity condition exists. A first one of the non-linearity parameters is updated based on an estimated magnitude of the measurement signal if the low velocity condition exists. At least one digital position value is compensated based on the updated non-linearity parameter if the low velocity condition exists.

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T, Eom, et al., article entitled “Single Frequency Laser Interferometer with Subnonometer Accuracy”; Proc. of 2nd Euspen International Conference, Turin, Italy; pp. 270-273; May 27-May 31, 2001.

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