Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-04-18
2006-04-18
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07030978
ABSTRACT:
A system and method for inspection of a substrate having a first refractive index, the method including the steps of: (i) defining an apodization scheme in response to a characteristic of the layer; (ii) applying an apodizer to apodize a beam of radiation in response to the apodization scheme; (iii) directing the apodized beam of radiation to impinge on the substrate, whereby a plurality of rays are reflected from the substrate; whereas the apodized beam of radiation propagates through an at least partially transparent medium having a third refractive index and an at least partially transparent layer having a second refractive index and is subsequently reflected from the substrate; whereas the second refractive index differs from the first refractive index and from the third refractive index; and (iv) detecting at least some of the plurality of reflected rays.
REFERENCES:
patent: 3614232 (1971-10-01), Mathisen
patent: 5768017 (1998-06-01), King et al.
patent: 5859424 (1999-01-01), Norton et al.
patent: 6184984 (2001-02-01), Lee et al.
patent: 2003/0137659 (2003-07-01), Milshtein
patent: 2004/0016896 (2004-01-01), Almogy
patent: 1 265 063 (2002-12-01), None
patent: WO 00/77500 (2000-12-01), None
“International Search Report”, International Searching Authority, PCT/US 03/36140, (May 3, 2004).
Feldman Haim
Guetta Avishay
Naftali Ron
Shoham Doron
Applied Materials, Israel, LTD
Fahmi Tarek N.
Stafira Michael P.
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