Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-12-17
2009-11-24
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S600000
Reexamination Certificate
active
07623227
ABSTRACT:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
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Bills Richard Earl
Gao Songping
Judell Neil
Kohl Ian Thomas
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
Slomski Rebecca C
Toatley Jr. Gregory J
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