System and method for inspecting a workpiece surface using...

Details System and method for inspecting a workpiece surface using... System and method for inspecting a workpiece surface using...

2007-10-23

2007-10-23

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S600000

Reexamination Certificate

active

11311926

ABSTRACT:
A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.

REFERENCES:
patent: 4846578 (1989-07-01), Morita et al.
patent: 2006/0192950 (2006-08-01), Judell et al.
patent: 2007/0024998 (2007-02-01), Bills et al.
patent: 4230068 (1994-03-01), None

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