Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-12-17
2009-10-20
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500, C356S600000
Reexamination Certificate
active
07605913
ABSTRACT:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
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Bills Richard Earl
Freischlad Klaus Reinhard
Judell Neil
McNiven James Peter
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
Pham Hoa Q
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