Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-03-21
2006-03-21
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S030000, C382S144000, C382S149000, C716S030000, C716S030000, C716S030000
Reexamination Certificate
active
07014955
ABSTRACT:
Automated techniques for identifying dummy/main features on a mask layer are provided. In a multiple mask layer technique, the definition of a dummy/main feature can be based on connectivity information or functional association information. In a geometry technique, the definition of a dummy/main feature can be based on a feature size, a feature shape, a pattern of features, or a proximity of a feature to a neighboring feature. In one embodiment, multiple definitions and multiple techniques can be used.
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Chang Fang-Cheng
Pierrat Christophe
Bever Hoffman & Harms LLP
Harms Jeanette S.
Synopsys Inc.
Young Christopher G.
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