System and method for improving TFT-array manufacturing yields

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation

Reexamination Certificate

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C324S701000, C702S084000, C700S097000

Reexamination Certificate

active

07024338

ABSTRACT:
A system and method for detecting defects in TFT-array panels is provided that improves defect detection accuracy by adjusting the thresholding parameters used to classify defective pixels when the number of defects reported by a TFT-array testing system exceeds a predetermined critical number. In a preferred embodiment, the thresholding parameters are adjusted until the number of reported defects is less than or equal to the predetermined critical number. The predetermined critical number represents a threshold number for determining if the number of reported defects is abnormally high. Reducing the number of reported defects to a number equal to or less than the predetermined critical number will decrease the operation time of the TFT-array repair equipment, because of the reduced number of potential defects it will be required to handle, and will also result in the TFT-array testing system reporting a smaller number of potential defects, with the potential defects that are reported having a higher probability of being real defects.

REFERENCES:
patent: 5546013 (1996-08-01), Ichioka et al.
patent: 6466882 (2002-10-01), Kang et al.

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