Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-05-03
2005-05-03
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
06888615
ABSTRACT:
Electromagnetic energy is emitted from an illumination source of a lithography device. A portion of the emitted electromagnetic energy passes through an illumination optics module. The illumination optics module includes a one-dimensional optical transform element having a pupil plane. An aperture device having an adjustable aperture is located proximate to the pupil plane so that a portion of the electromagnetic energy received by the one-dimensional optical transform element passes through the aperture of the aperture device. The angular distribution of the electromagnetic energy passing through the illumination optics module is adjusted as a function of illumination field position using the aperture device, thereby improving line width control in the lithography device.
REFERENCES:
patent: 4988188 (1991-01-01), Ohta
patent: 5296892 (1994-03-01), Mori
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5631721 (1997-05-01), Stanton et al.
patent: 5724122 (1998-03-01), Oskotsky
patent: 5726740 (1998-03-01), Shiozawa et al.
patent: 5895737 (1999-04-01), McCullough et al.
patent: 5896188 (1999-04-01), McCullough
patent: 5966202 (1999-10-01), McCullough
patent: 6013401 (2000-01-01), McCullough et al.
patent: 6072852 (2000-06-01), Hudyma et al.
patent: 6259513 (2001-07-01), Gallatin et al.
patent: 20010043318 (2001-11-01), Mori
patent: 20010046038 (2001-11-01), Mulkens et al.
patent: 20020014600 (2002-02-01), Sato et al.
patent: 20030197846 (2003-10-01), Coston et al.
patent: 1 248 151 (2002-10-01), None
Search Report from the Intellectual Property Office of Singapore, issued Jun. 9, 2004 for Appl. No. 200302345-4, 6 pages.
Derwent Abstract Accession No. 96-385544/39; Class P81, P84; English Language Abstract of DE 196 06 170 A1; (Sharp KK); Aug. 22, 1996; 1 page.
Derwent Abstract Accession No. 2002-037678/05; Class P84; English Language Abstract of JP 2001-267205 A; (NEC Corp); Sep. 28, 2001; 1 page.
Derwent Abstract Accession No. 2000-611651/58; Class P84, U11; English Language Abstract of WO 200057459-A1 (Nikon Corp); Sep. 28, 2000; 2 pages.
Coston Scott D.
Tsacoyeanes James G.
ASML Holding N.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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