System and method for illuminating a specimen with uniform...

Details System and method for illuminating a specimen with uniform... System and method for illuminating a specimen with uniform...

2007-08-09

2010-02-02

Sember, Thomas M (Department: 2885)

Illumination

Light fiber, rod, or pipe

With intensity control

C362S551000, C362S268000, C359S368000

Reexamination Certificate

active

07654715

ABSTRACT:
A system for illuminating a specimen are disclosed herein. In general, the system may include an illumination source configured to generate light with an uneven distribution at a pupil plane and field stop of the system, a lightpipe coupled for redistributing the light across the pupil plane and field stop, and at least one optical element configured to direct the redistributed light onto a specimen. The lightpipe may generally include a cone-shaped portion and a rectangular-shaped portion. The cone-shaped portion is configured for modifying an angular distribution of the generated light, so that the redistributed light is uniformly distributed across the pupil plane of the system. The rectangular-shaped portion is formed contiguous with the cone-shaped portion and configured for modifying a spatial distribution of the generated light, so that the redistributed light is uniformly distributed across a field stop of the system. A method for illuminating a specimen and a system for inspecting a specimen are also disclosed herein.

REFERENCES:
patent: 5677762 (1997-10-01), Ortyn et al.
patent: 6571040 (2003-05-01), Paris
patent: 6898353 (2005-05-01), Li
patent: 6969177 (2005-11-01), Li et al.
patent: 7001055 (2006-02-01), Lange
patent: 7304731 (2007-12-01), Hill
patent: 2002/0122621 (2002-09-01), Li
patent: 2006/0268420 (2006-11-01), Cummings et al.
patent: 2007/0052953 (2007-03-01), Hill

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