Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2008-03-25
2008-03-25
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
11264733
ABSTRACT:
An apparatus and method for examining features of a sample with a broadband beam of light obtained from a long-wavelength source that may include two distinct emitters that emit a long-wavelength radiation and a short-wavelength source that emits a short-wavelength radiation. A passage is positioned between the sources and a reflective beam combining optics is provided for shaping the long-wavelength radiation to enter the short-wavelength source via the passage and also for shaping the short-wavelength radiation that exits through the passage and propagates toward the long-wavelength source. The reflective beam combining optics shape the short-wavelength radiation such that it re-enters the short-wavelength source via the passage and is combined with the long-wavelength radiation into the broadband beam that exits the short-wavelength source. A beam steering optics projects the broadband beam to a spot on the sample, and a scattered broadband radiation from the spot is intercepted and shaped to a broadband signal beam, which is passed through a sampling pinhole that passes a test portion of it on to a detector for optical examination; the test portion that is passed can correspond to a center portion of the spot.
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Aho Marc
Amin Homan
Balooch Mehdi
Forouhi Abdul Rahim
Li Guoguang
Akanbi Isiaka O
Chowdhury Tarifur
Lumen Patent Firm, Inc.
n&k Technology Inc.
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