System and method for high intensity small spot optical...

Optics: measuring and testing – Shape or surface configuration

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

11264733

ABSTRACT:
An apparatus and method for examining features of a sample with a broadband beam of light obtained from a long-wavelength source that may include two distinct emitters that emit a long-wavelength radiation and a short-wavelength source that emits a short-wavelength radiation. A passage is positioned between the sources and a reflective beam combining optics is provided for shaping the long-wavelength radiation to enter the short-wavelength source via the passage and also for shaping the short-wavelength radiation that exits through the passage and propagates toward the long-wavelength source. The reflective beam combining optics shape the short-wavelength radiation such that it re-enters the short-wavelength source via the passage and is combined with the long-wavelength radiation into the broadband beam that exits the short-wavelength source. A beam steering optics projects the broadband beam to a spot on the sample, and a scattered broadband radiation from the spot is intercepted and shaped to a broadband signal beam, which is passed through a sampling pinhole that passes a test portion of it on to a detector for optical examination; the test portion that is passed can correspond to a center portion of the spot.

REFERENCES:
patent: 1961964 (1934-06-01), Dodge
patent: 2064252 (1936-12-01), Fortney
patent: 3937576 (1976-02-01), Schmider
patent: 4611143 (1986-09-01), Shimazu
patent: 5517312 (1996-05-01), Finarov
patent: 5686993 (1997-11-01), Kokubo
patent: 5910842 (1999-06-01), Piwonka-Corle
patent: 5917594 (1999-06-01), Norton
patent: 5972469 (1999-10-01), Curtis
patent: 6268917 (2001-07-01), Johs
patent: 6323946 (2001-11-01), Norton
patent: 6563571 (2003-05-01), Nuzzio
patent: 6583877 (2003-06-01), Norton
patent: 6690111 (2004-02-01), Davenport
patent: 6734967 (2004-05-01), Piwonka-Corle
patent: 6862090 (2005-03-01), Chen
patent: 2002/0024669 (2002-02-01), Danner
patent: 2002/0030813 (2002-03-01), Norton
patent: 2002/0171830 (2002-11-01), Norton
patent: 2003/0020912 (2003-01-01), Norton et al.
patent: 2003/0133102 (2003-07-01), Opsal
patent: 2004/0008349 (2004-01-01), Norton
patent: 2004/0100632 (2004-05-01), Piwonka-Corle et al.
patent: 2005/0105090 (2005-05-01), Piwonka-Corle et al.
patent: 2005017140 (2005-01-01), None
Zaidi, Shoaib et al., “FTIR-Based Non-Destructive Method for Metrology of Depths in Poly Silicon Filled Trenches,” Metrology, Inspection and Process Control for Microlithography XVII, Proceedings of SPIE vol. 5038, 2003.
Guittet, P.-Y., et al., “Infrared Spectoscopic Ellipsometry in Semiconductor Manufacturing,” Metrology, Inspection and Process Control for Microlithography XVII, Proceedings of SPIE vol. 5375,2004.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

System and method for high intensity small spot optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for high intensity small spot optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for high intensity small spot optical... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3933627

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.