System and method for generating and controlling multiple...

Details System and method for generating and controlling multiple... System and method for generating and controlling multiple...

2005-06-21

2005-06-21

Wong, Don (Department: 2821)

Coherent light generators

Miscellaneous

C359S196100, C359S223100, C359S225100, C359S226200, C359S618000, C359S629000

Reexamination Certificate

active

06909735

ABSTRACT:
A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently steerable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, a mirror controller for controlling each beamlet steering mirror, and an optical path including a scanning lens for directing each steered beamlet to a target area of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump located in the optical path for intercepting a beamlet steered into the beam dump by the corresponding beamlet steering mirror.

REFERENCES:
patent: 5010232 (1991-04-01), Arai et al.
patent: 6407363 (2002-06-01), Dunsky et al.
patent: 6433301 (2002-08-01), Dunsky et al.
patent: 6531677 (2003-03-01), Arai et al.
patent: 6610960 (2003-08-01), De Steur et al.
patent: 6696008 (2004-02-01), Brandinger
patent: 6791694 (2004-09-01), Pezeshki
patent: 2003/0213787 (2003-11-01), Dunsky et al.

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