Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-05-20
1994-10-04
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356356, 356352, 25044211, G01B 1102
Patent
active
053531159
ABSTRACT:
A system and method for generating a desired displacement of an object, i.e., a target, from a reference position with ultra-high accuracy utilizes a Fabry-Perot etalon having an expandable tube cavity for resolving, with an Iodine stabilized laser, displacements with high accuracy and for effecting (as an actuator) displacements of the target. A mechanical amplifier in the form of a micropositioning stage has a platform and a frame which are movable relative to one another, and the tube cavity of the etalon is connected between the platform and frame so that an adjustment in length of the cavity effects a corresponding, amplified movement of the frame relative to the cavity. Therefore, in order to provide a preselected magnitude of displacement of the stage frame relative to the platform, the etalon tube cavity is adjusted in length by a corresponding amount. The system and method are particularly well-suited for use when calibrating a high accuracy measuring device.
REFERENCES:
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patent: 4659224 (1987-04-01), Monchalin
The Fabry-Perot Interometer; History, Theory, Practice, and Applications, J. M. Vaughan (Adam Hilger, IOP Pub. Ltd., Bristol, England, 1989) pp. 184-213.
Test and Measurement Catalog/Hewlett Packard Laser Interferometers 1992 pp. 423-426.
Axiom 2/20 Optical Heterodyne Interferometers/ZYGO Laser Measurement Systems, Chapt., 2, pp. 2-1 to 2-44.
Status of a Silicon Lattice Measurement and Dissemination Exercise, R. D. Deslattes and E. G. Kessler, Jr., IEEE Trans' Apr., 91, pp. 92-97.
OPTRAMETER and OPTRALITE Product Bulletins, OPTRA, Peabody, Mass.
Product Bulletin, X-Y Piezo-Flex(TM) Micropositioner, Wye Creek Instruments, Fredrick, Md., Nov. 1988.
Adams Harold W.
Keesee, II LaCharles P.
Martin Marietta Energy Systems Inc.
McKee Michael E.
Spicer James M.
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