Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
Reexamination Certificate
2008-03-25
2008-03-25
Huff, Mark F. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
C430S011000, C430S394000, C359S558000, C359S565000, C359S573000
Reexamination Certificate
active
10677173
ABSTRACT:
A method is disclosed for forming an array of focusing elements for use in a lithography system. The method involves varying an exposure characteristic over an area to create a focusing element that varies in thickness in certain embodiments. In further embodiments, the method includes the steps of providing a first pattern via lithography in a substrate, depositing a conductive absorber material on the substrate, applying an electrical potential to at least a first portion of the conductive absorber material, leaving a second portion of the conductive material without the electrical potential, and etching the second portion of the conductive material to provide a first pattern on the substrate that is aligned with the first portion of the conductive absorber material.
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Carter David J.
Gil Dario
Goodberlet James G.
Hastings Jeffrey T.
Menon Rajesh
Chacko-Davis Daborah
Gauthier & Connors LLP
Huff Mark F.
Massachusetts Institute of Technology
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