Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2005-10-11
2005-10-11
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
Reexamination Certificate
active
06954715
ABSTRACT:
A system and method for equipment malfunction detection and diagnosis. The system includes equipment and a detection/diagnosis unit. The equipment transfers status information thereof to the detection/diagnosis unit at preset intervals. The detection/diagnosis unit receives and stores the status information of the equipment, and checks whether the status information conforms to a process control standard. If not, it is determined that the equipment has a malfunction, and the detection/diagnosis unit generates a notification or warning message, stops the operation of the equipment, and retrieves a recovery measure for the malfunction from a diagnostic database.
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Bui Bryan
Pretlow Demetrius
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
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