System and method for eliminating the structure and edge...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C219S121680

Reexamination Certificate

active

07732104

ABSTRACT:
The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved.

REFERENCES:
patent: 5057664 (1991-10-01), Johnson et al.
patent: 6090507 (2000-07-01), Grenon et al.
patent: 6120725 (2000-09-01), Asahi et al.
patent: 6156461 (2000-12-01), Grenon et al.
patent: 6165649 (2000-12-01), Grenon et al.
patent: 6190836 (2001-02-01), Grenon et al.
patent: 6333485 (2001-12-01), Haight et al.
“Laser Induced Periodic Surface Structure: Experiments on Ge, Si, Al, and Brass”, Young, Preston, vsn Driel, and Sipe, Physical Review B, vol. 27, No. 2, pp. 1155-1172 (1983).
“Ultraviolet Laser Induced Periodic Surface Structures”, Clark and Emmony, Physical Review B, vol. 40, No. 4, pp. 2031-2041 (1989).
“Femtosecond Laser Induced Periodic Surface Structure on Diamond Film”, Wu, Ma, Fang, Liao, Yu, Chen, Wang, Applied Physics Letters, vol. 82, No. 11, pp. 1703-1705 (2003); and.
“Self Organixed Nanogratings in Glass Irradiated by Ultrashort Light Pulses”, Shimotsuma, Kazansky, Qui, Hirao, Physical Review Letters, vol. 19, No. 24, pp. 247205-1 to 4 (2003).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

System and method for eliminating the structure and edge... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for eliminating the structure and edge..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for eliminating the structure and edge... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4240828

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.