System and method for electronically collecting data in a...

Details System and method for electronically collecting data in a... System and method for electronically collecting data in a...

2005-03-01

2005-03-01

Pert, Evan (Department: 2829)

Data processing: measuring, calibrating, or testing

Measurement system

History logging or time stamping

C702S188000

Reexamination Certificate

active

06862557

ABSTRACT:
The present invention is a system for electronically collecting data in a process line in a semiconductor or data storage fabrication facility. The system includes a data collection processing unit configured to sniff data packets transmitted over a LAN between a plurality of tools in the fabrication facility. The data collection processing unit is further configured to determine if the sniffed data packets are valid data packets based on a configuration file established for the plurality of tools. The data collection processing unit is further configured to parse one or more data fragments from the valid data packets.

REFERENCES:
patent: 6721618 (2004-04-01), Baek et al.
“Snoop Server,” searchSecurity.com Definitions, web page printed on Mar. 14, 2003, p.1, located at http://searchsecurity.techtarget.com/sDefinition/0,,sid14_gci773799,00.html.
“SECS/GEM Introduction,” web page printed on Mar. 13, 2003, pp. 1-4, located at http://www.cimetrix.com/gemintromain.html.

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