Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-10-30
2007-10-30
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C702S051000, C073S040000, C073S040700
Reexamination Certificate
active
11206675
ABSTRACT:
In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.
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Arruda Joseph D.
Gilchrist Glen F. R.
Keay Kathleen D.
Brooks Automation Inc.
Garland Steven R.
Hamilton Brook Smith & Reynolds PC
Picard Leo
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