Liquid crystal cells – elements and systems – Particular structure – Having significant detail of cell structure only
Patent
1998-04-02
2000-10-31
Malinowski, Walter
Liquid crystal cells, elements and systems
Particular structure
Having significant detail of cell structure only
349189, 216 23, 216 39, 445 24, G02F 11333, G02F 11341, C30B 3300, B23P 1500, C03C 2500
Patent
active
061410721
ABSTRACT:
The present invention enables efficient microfabrication of a fully integrated liquid crystal display device. Initially, a sacrificial layer is formed on a substrate that has conductive pads connected thereto. The sacrificial layer is patterned, and portions of the sacrificial layer are removed to expose portions of the underlying layer supporting the sacrificial layer. Then, a permeable layer is formed on the sacrificial layer, thereby filling in the space vacated by the removed potions of the sacrificial layer. The structure is heated and the material of the sacrificial layer is allowed to dissolve into and dissipate through the permeable layer in order to leave a cavity. Once the sacrificial layer is removed, the permeable layer is supported by the portion of the permeable layer filling in the space vacated by the removed portions of the sacrificial layer. Accordingly, a monolithic liquid crystal display is easily and reliably formed without having to etch an opening in the structure to allow the sacrificial material to egress from the structure and without having to separately attach mechanical components to each liquid crystal display manufactured.
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Drabik Timothy J.
Kohl Paul A.
Georgia Tech Research Corporation
Malinowski Walter
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