System and method for ECM land erosion metrology

Details System and method for ECM land erosion metrology System and method for ECM land erosion metrology

2005-06-14

2005-06-14

Raevis, Robert (Department: 2856)

Measuring and testing

Embrittlement or erosion

Reexamination Certificate

active

06904790

ABSTRACT:
A system and method for characterizing and measuring hydrodynamic grooves made by ECM processes is disclosed. The method includes a procedure for alignment of the work piece to the measurement apparatus as well as a technique for accurately reliably measuring the erosion pattern quickly. Additionally, the invention provides a system for characterizing and measuring the erosion of these grooves.

REFERENCES:
patent: 5251154 (1993-10-01), Matsumoto et al.
patent: 5934680 (1999-08-01), Kakehi et al.
patent: 6067720 (2000-05-01), Heilbronner et al.
patent: 6239436 (2001-05-01), Parker et al.
patent: 6297652 (2001-10-01), Shimoda et al.

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