Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-06-13
2006-06-13
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400, C356S237500
Reexamination Certificate
active
07061601
ABSTRACT:
A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.
REFERENCES:
patent: 3885875 (1975-05-01), Rosenfeld et al.
patent: 4182259 (1980-01-01), Garner et al.
patent: 4332477 (1982-06-01), Sato
patent: 4538909 (1985-09-01), Bible et al.
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4668860 (1987-05-01), Anthon
patent: 4870631 (1989-09-01), Stoddard
patent: 4873430 (1989-10-01), Juliana et al.
patent: 4886975 (1989-12-01), Murakami et al.
patent: 4893932 (1990-01-01), Knollenberg
patent: 5017012 (1991-05-01), Merritt, Jr. et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5189481 (1993-02-01), Jann et al.
patent: 5196906 (1993-03-01), Stover et al.
patent: 5270794 (1993-12-01), Tsuji et al.
patent: 5293216 (1994-03-01), Moslehi
patent: 5313542 (1994-05-01), Castonguay
patent: 5331406 (1994-07-01), Fishbaine et al.
patent: 5406082 (1995-04-01), Pearson et al.
patent: 5416594 (1995-05-01), Gross et al.
patent: 5446549 (1995-08-01), Mazumder et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5586101 (1996-12-01), Gage et al.
patent: 5608527 (1997-03-01), Valliant et al.
patent: 5610897 (1997-03-01), Yamamoto et al.
patent: 5631171 (1997-05-01), Sandstrom et al.
patent: 5633747 (1997-05-01), Nikoonahad
patent: 5644562 (1997-07-01), de Groot
patent: 5694214 (1997-12-01), Watanabe et al.
patent: 5715058 (1998-02-01), Bohnert et al.
patent: 5726455 (1998-03-01), Vurens
patent: 5748305 (1998-05-01), Shimono et al.
patent: 5754297 (1998-05-01), Nulman
patent: 5777740 (1998-07-01), Lacey et al.
patent: 5798829 (1998-08-01), Vaez-Iravani
patent: 5835220 (1998-11-01), Kazama et al.
patent: 5864394 (1999-01-01), Jordan, III et al.
patent: 5875029 (1999-02-01), Jann et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5903342 (1999-05-01), Yatsugake et al.
patent: 5909276 (1999-06-01), Kinney et al.
patent: 5951891 (1999-09-01), Barenboim et al.
patent: 5978091 (1999-11-01), Jann et al.
patent: 5985680 (1999-11-01), Singhal et al.
patent: 5986761 (1999-11-01), Crawforth et al.
patent: 5986763 (1999-11-01), Inoue
patent: 5995226 (1999-11-01), Abe et al.
patent: 6028671 (2000-02-01), Svetkoff et al.
patent: 6034378 (2000-03-01), Shiraishi
patent: 6043502 (2000-03-01), Ahn
patent: 6078386 (2000-06-01), Tsai et al.
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6088092 (2000-07-01), Chen et al.
patent: 6091493 (2000-07-01), Stover et al.
patent: 6104481 (2000-08-01), Sekine et al.
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 6118525 (2000-09-01), Fossey et al.
patent: 6134011 (2000-10-01), Klein et al.
patent: 6157444 (2000-12-01), Tomita et al.
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6248988 (2001-06-01), Krantz
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6307627 (2001-10-01), Vurens
patent: 6353222 (2002-03-01), Dotan
patent: 6384910 (2002-05-01), Vaez-Iravani et al.
patent: 6509966 (2003-01-01), Ishiguro
patent: 6515745 (2003-02-01), Vurens et al.
patent: 6542248 (2003-04-01), Schwarz
patent: 6548821 (2003-04-01), Treves et al.
patent: 6603542 (2003-08-01), Chase et al.
patent: 6630996 (2003-10-01), Rao et al.
patent: 6639662 (2003-10-01), Vaez-Iravani et al.
patent: 6757056 (2004-06-01), Meeks et al.
patent: 6804003 (2004-10-01), Wang et al.
patent: 6809809 (2004-10-01), Kinney et al.
patent: 2001/0000679 (2001-05-01), Vaez-Iravani et al.
patent: 2001/0030296 (2001-10-01), Ishimaru et al.
patent: 2002/0005945 (2002-01-01), Isozaki et al.
patent: 2003/0025905 (2003-02-01), Meeks
patent: 2004/0169850 (2004-09-01), Meeks
patent: 3-221804 (1991-09-01), None
patent: 04-162215 (1992-05-01), None
patent: 10-227764 (1998-08-01), None
patent: 11-173994 (1999-07-01), None
patent: WO 98/52019 (1998-11-01), None
W.C. Leung, W. Crooks, H. Rosen and T. Strand,An Optical Method Using a Laser and an Integrating Sphere Combination for Characterizing the Thickness Profile of Magnetic Media, Sep. 1989, IEEE Transaction on Magnetics, vol. 25, No. 5, pp. 3659-3661.
Steven W. Meeks, Walter E. Weresin, and Hal J. Rosen,Optical Surface Analysis of the Head-Disk-Interface of Thin Film Disks, Jan. 1995, Transactions of the ASME, Journal of Tribology, vol. 117, pp. 112-118.
Steven Meeks, Maxtor and Rusmin Kudinar,The Next Battleground: Head-Disk Interface, Mar. 1998, Data Storage, Test & Measurement, pp. 29-30, 34 and 38.
Laser Scanning Surface Profilometer, [online], Aug. 1970, [retrieved Jan. 29, 2001], pp. 789-790, Retrieved from the Internet: <URL: http://www.delphion.com/tdbs/tdb?&order=7OC101758.
Meeks, Steven W.: “A Combined Ellipsometer, Reflectometer, Scatterometer and Kerr Effect Microscope for Thin Film Disk Characterization,” Machine Vision Applications in Industrial Inspection VIII, Proceedings of SPIE, vol. 3966, 2000, pp. 385-391, XP001085220.
Ikeda, Y. et al., “Characterization of a Disk Texture Transition Zone by Use of an Optical Surface Analyzer,” Digests of Intermag., International Magnetics Conference, San Antonio, Apr. 18-21, 1995, p. Ed-2.
European Search Report, Application No. 04028745.0-2204, Apr. 6, 2005.
Meeks, Steven W., “Optical Surface Analyzer Inspects Transparent Wafers,” Laser Focus World, Jul. 2003, pp. 105-106, 108.
Cavon & Aghevli LLC
KLA-Tencor Technologies Corporation
Stafira Michael P.
LandOfFree
System and method for double sided optical inspection of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for double sided optical inspection of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for double sided optical inspection of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3656533