Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate
2005-07-29
2008-08-26
Wilczewski, M. (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With desiccant, getter, or gas filling
C257S704000
Reexamination Certificate
active
07417307
ABSTRACT:
A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
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Chen Chien-Hua
Haluzak Charles C
Piehl Arthur
Shih Jennifer
Chhaya Swapneel
Hewlett--Packard Development Company, L.P.
Wilczewski M.
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