Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2007-09-25
2007-09-25
Lindsay, Jr., Walter L (Department: 2812)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C118S050100, C118S725000, C118S724000, C438S123000, C219S411000
Reexamination Certificate
active
10875788
ABSTRACT:
A system and method for determining the temperature of a semiconductor wafer at the time of thermal contact of the semiconductor wafer with a temperature sensing element. According to the invention, a temperature profile of the temperature sensing element is recorded from the time of thermal contact up to the time of thermal equilibrium between the semiconductor wafer and the temperature sensing element and the temperature of the semiconductor wafer at the time of thermal contact is determined on the basis of a time period between the time of thermal contact and the time of thermal equilibrium and the temperature TGof the semiconductor wafer reached at the time tGof thermal equilibrium is determined by back calculation with the aid of an equation derived from Newton's law of cooling.
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Infineon - Technologies AG
Lindsay, Jr. Walter L
Patterson & Sheridan L.L.P.
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