System and method for determining the alignment quality in...

Optics: measuring and testing – Angle measuring or angular axial alignment – Automatic following or aligning while indicating measurement

Reexamination Certificate

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Details

C356S400000, C359S237000

Reexamination Certificate

active

07079233

ABSTRACT:
An alignment detection system is disclosed for determining whether a modulated illumination field in an imaging system employing an illumination modulator is mis-aligned. The alignment detection system includes a modulator adjustment unit for providing a test pattern on the illumination modulator, a detector for receiving a modulated illumination field from the illumination modulator, a sampling unit for determining at least two sample values (A and C) for each of two areas of the modulated illumination field respectively, and an evaluation unit for determining whether the value |A−C| is greater than a threshold value.

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