System and method for determining positions of structures on...

Details System and method for determining positions of structures on... System and method for determining positions of structures on...

2011-07-12

2011-07-12

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C340S626000

Reexamination Certificate

active

07978340

ABSTRACT:
A system and a method for determining positions of structures on a substrate are disclosed. The system includes at least one measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (9) and a camera for determining the positions of the structures (3) on the substrate (2). The position of the measurement objective (9) and/or the measurement table (20) may be determined by at least one interferometer (24). The system is surrounded by a housing representing a climatic chamber (50) provided with an active pressure regulation.

REFERENCES:
patent: 5469260 (1995-11-01), Takagi et al.
patent: 5909276 (1999-06-01), Kinney et al.
patent: 6267131 (2001-07-01), Masada et al.
patent: 6580087 (2003-06-01), Suzuki et al.
patent: 7196507 (2007-03-01), Schneidewind et al.
patent: 7817262 (2010-10-01), Ehrenberg et al.
patent: 2004/0035851 (2004-02-01), Antoniou et al.
patent: 2005/0134839 (2005-06-01), Kreh et al.
patent: 2007/0085986 (2007-04-01), Okada
patent: 19628969 (1997-10-01), None
patent: 19949005 (2001-05-01), None
patent: 103 59 722 (2005-07-01), None
patent: 102005052757 (2007-05-01), None
Dieter Adam, et al., First Measurement Data Obtained on the New Vistec LMS IPR04, Proc. of SPIE, vol. 6533, 653001-7 (2007), 23rd European Mask and Lithography Conference.
Bläsing, Dr. Carola, “Pattern Placement Metrology for Mask Making,” Wetzlar, Germany, Mar. 31, 1998.

Affiliated with

Also associated with

Rating

System and method for determining positions of structures on... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for determining positions of structures on..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for determining positions of structures on... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2695531