Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-05
2006-12-05
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
07145636
ABSTRACT:
A lithographic method and apparatus used to pattern an object. An illumination source supplies a beam of radiation. A pattern generator forms a pattern to pattern a beam of radiation using the pattern data. A projection system projects the patterned beam onto a target portion of a substrate supported by a stage during an exposure operation. A control module determines a respective maximum operational parameter for the illumination source, the pattern generator, and/or the stage.
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Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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