Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-05-22
2007-05-22
Epps, Georgia (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559040, C250S225000, C356S237400, C356S364000
Reexamination Certificate
active
10413657
ABSTRACT:
A system and method for detecting defects in semiconductor wafers in a rapid non-destructive manner. Defects in semiconductor wafers can include micropipes and screw dislocations, stress striations, planer defects, polytype inclusions, and others. When a wafer is illuminated by polarized light, the defects induce birefringence of the polarized light that can be visualized by a polariscope to detect defects in wafers. Defects can cause linearly inputted polarized light to emerge as elliptically polarized light after transmission through a wafer having defects. Placing the wafer between a set of polarizers under the cross poles condition allows for a rapid non-destructive system and method for delineating and locating defects within a semiconductor wafer.
REFERENCES:
patent: 5248876 (1993-09-01), Kerstens et al.
patent: 6825487 (2004-11-01), Preece
patent: 6900892 (2005-05-01), Shchegrov et al.
patent: 2003/0178588 (2003-09-01), Ota
patent: 2004/0087112 (2004-05-01), Liu
Ma Xianyun
Sudarshan Tangali S.
Kim Douglas W.
McNair Law Firm, P.A.
The University of South Carolina
Williams Don
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