System and method for detecting defects in an interlayer dielect

Details System and method for detecting defects in an interlayer dielect System and method for detecting defects in an interlayer dielect

1998-08-10

2000-02-08

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356372, 356213, G01N 2100

Patent

active

060233273

ABSTRACT:
A system for detecting defects in an interlayer dielectric (ILD) interposed between two conductive lines is provided. The system includes a processor for controlling general operations of the system. The system also includes a voltage source adapted to apply a bias voltage between the two conductive lines and induce a leakage current across the ILD. The system employs a light source to illuminate at least a portion of the ILD and enhance the leakage current. A current source is used to measure the induced leakage current, the current source being operatively coupled to the processor. The processor determines the existence of a defect in the ILD based on the measured leakage current.

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