Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-07-03
2007-07-03
Von Buhr, M. N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S116000
Reexamination Certificate
active
10901371
ABSTRACT:
A design system for delivering data via a network to a plant, which fabricates a semiconductor device by direct writing, includes: a data conversion unit generating the data specified by a product name of the semiconductor device, a layer name, and a machine type of an electron beam lithography system for the direct writing; a central memory unit recording the data; and a plant mediator distributing the data to the plant via the network, and re-distributing the data to the plant in response to a download request associated with the product name, the layer name, and the machine type.
REFERENCES:
patent: 6313476 (2001-11-01), Shimizu et al.
patent: 6336056 (2002-01-01), Fujimoto et al.
patent: 6544698 (2003-04-01), Fries
patent: 6578188 (2003-06-01), Pang et al.
patent: 6591207 (2003-07-01), Naya et al.
patent: 6674086 (2004-01-01), Kamada et al.
patent: 6686914 (2004-02-01), Keener
patent: 6725237 (2004-04-01), Clairmont et al.
patent: 6828542 (2004-12-01), Ye et al.
patent: 7041512 (2006-05-01), Fujiyoshi et al.
patent: 7079994 (2006-07-01), Inanami et al.
patent: 2002/0157068 (2002-10-01), LaCour et al.
patent: 2003/0029912 (2003-02-01), Li et al.
patent: 2004/0104357 (2004-06-01), Fujiyoshi et al.
patent: 2004/0107412 (2004-06-01), Pack et al.
patent: 2004/0117757 (2004-06-01), Inanami et al.
patent: 2004/0133369 (2004-07-01), Pack et al.
patent: 2004/0181769 (2004-09-01), Kochpatcharin et al.
patent: 2005/0119843 (2005-06-01), Naya et al.
patent: 2005/0216878 (2005-09-01), Word et al.
patent: 2005/0246049 (2005-11-01), Suttile et al.
patent: 2006/0000964 (2006-01-01), Ye et al.
patent: 2002-351931 (2002-12-01), None
Ito Takema
Morinaga Hiroyuki
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