Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2011-06-28
2011-06-28
Sakelaris, Sally A (Department: 1773)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C382S145000, C382S128000, C382S112000, C382S149000, C257S072000, C257S048000, C356S237100, C438S015000, C438S016000, C438S014000
Reexamination Certificate
active
07969564
ABSTRACT:
A method and system for defect localization includes: (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, such as charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.
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Almogy Gilad
Levin Lior
Talbot Chris
Applied Materials Israel, Ltd.
Sakelaris Sally A
SNR Denton US LLP
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