System and method for defect localization on electrical test...

Details System and method for defect localization on electrical test... System and method for defect localization on electrical test...

2011-06-28

2011-06-28

Sakelaris, Sally A (Department: 1773)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C382S145000, C382S128000, C382S112000, C382S149000, C257S072000, C257S048000, C356S237100, C438S015000, C438S016000, C438S014000

Reexamination Certificate

active

07969564

ABSTRACT:
A method and system for defect localization includes: (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, such as charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.

REFERENCES:
patent: 5272434 (1993-12-01), Meyrueix et al.
patent: 5394098 (1995-02-01), Meyrueix et al.
patent: 5699447 (1997-12-01), Alumot et al.
patent: 6271671 (2001-08-01), Charles et al.
patent: 6403386 (2002-06-01), Liu
patent: 0 493 906 (1992-07-01), None
patent: 0 299 432 (1993-01-01), None
“What is a lock-in Amplifier” Perkin Elmer Technical note, 2000.
“Explore the Lock-in Amplifier” EG&G Princeton Applied Research, 1983.
Applied Materials Israel, Ltd.; CN Application No. 200380101404.X; Office Action dated Sep. 7, 2007; 21pp.
Applied Materials Israel, Ltd.; CN Application No. 200380101404.X; Office Action dated Jun. 27, 2008; 6pp.
International Search Report, PCT/US2003/031398, Mar. 19, 2004, 6pp.

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