Electrical generator or motor structure – Dynamoelectric – Rotary
Reexamination Certificate
2007-10-30
2007-10-30
Mullins, Burton (Department: 2834)
Electrical generator or motor structure
Dynamoelectric
Rotary
C310S012060, C310S054000
Reexamination Certificate
active
10813258
ABSTRACT:
A system and method of cooling motors of a lithographic tool. The system includes a temperature-adjusting device which adjusts the temperature of a heat transfer fluid to a boiling temperature that is substantially equal to the desired motor housing temperature. The system further includes a fixed or adjustable pressure device which adjusts the pressure of the heat transfer fluid to a predetermined level to maintain the boiling temperature. The boiling temperature remains substantially constant as the heat generated by the motor is absorbed by the heat transfer fluid. A pump pumps the heat transfer fluid through the temperature adjusting device, the pressure device and the motor. The system functions as a closed-looped system with the addition of a condenser/heat exchanger.
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Eaton John K.
Hazelton Andrew J.
Mukerji Debjit
Greenblum & Bernstein P.L.C.
Mullins Burton
Nikon Corporation
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