Fluid handling – Processes – Involving pressure control
Reexamination Certificate
2006-01-17
2006-01-17
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Processes
Involving pressure control
C137S487500
Reexamination Certificate
active
06986359
ABSTRACT:
A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for controlling the valves, and a zone pressure estimator. The zone pressure estimator is connected to the pressure transducers and is programmed to calculate an estimated pressure in each the i zones and provide the estimated pressures to the control device.
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Nagarkatti Siddharth P.
Shajii Ali
Krishnamurthy Ramesh
MKS Instruments Inc.
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