System and method for controlling light scattered from a...

Details System and method for controlling light scattered from a... System and method for controlling light scattered from a...

2008-06-20

2010-02-09

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S600000

Reexamination Certificate

active

07659974

ABSTRACT:
In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.

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