System and method for controlling light scattered from a...

Details System and method for controlling light scattered from a... System and method for controlling light scattered from a...

2005-12-17

2008-08-26

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S600000

Reexamination Certificate

active

07417722

ABSTRACT:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.

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