Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2007-12-11
2007-12-11
Porta, David (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
C250S339110
Reexamination Certificate
active
11075806
ABSTRACT:
A system and a method for controlling the multi-component composition such as photoresist, stripper, developer, etchant, thinner, rinser/cleaner and etch bead remover, for a lithography process, which is used for manufacturing a semiconductor device, a liquid crystal display device and so on, are disclosed. The system includes a composition circulator for withdrawing the composition from a storage tank retaining the composition for a lithography process, and for recycling the withdrawn composition to the storage tank, through a flow cell; a composition analyzer for measuring an absorbance of the composition passing through the flow cell, and for calculating the concentration of at least one component of the composition from the measured absorbance; a component supplier for supplying a deficient component to the storage tank when a concentration of the deficient component is below a predetermined level; and a controller for controlling the component supplier to adjust the concentration of each component of the composition according to the absorbance.
REFERENCES:
patent: 7127358 (2006-10-01), Yue et al.
patent: 2003/0138710 (2003-07-01), Park et al.
patent: 2003/0235997 (2003-12-01), Lee et al.
patent: 2004/0180269 (2004-09-01), Balasubramaniam et al.
Kim Jong-Min
Lee Jae-Ku
Lee Ki-Beom
Lee Min-Gun
Park Mi-Sun
Baker David S
Birch & Stewart Kolasch & Birch, LLP
Dongjin Semichem Co., Ltd.
Porta David
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