System and method for controlling a stage assembly

Details System and method for controlling a stage assembly System and method for controlling a stage assembly

2008-09-30

2008-09-30

Donovan, Lincoln (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C355S053000, C355S077000, C318S567000, C318S038000, C318S053000

Reexamination Certificate

active

11107231

ABSTRACT:
A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240), and a second mover assembly (244). The first mover assembly (242) moves the first stage (238) with a first acceleration profile (366) during the movement step (257) and the second mover assembly (244) moves the second stage (240) with a second acceleration profile (368) during the movement step (257) that is different than the first acceleration profile. For example, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher maximum acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257). Further, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher average acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257).

REFERENCES:
patent: 2004/0257548 (2004-12-01), Dams et al.

Affiliated with

Also associated with

Rating

System and method for controlling a stage assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for controlling a stage assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for controlling a stage assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3914655