Refrigeration – Storage of solidified or liquified gas – Liquified gas transferred as liquid
Patent
1996-11-25
1998-06-09
Kilner, Christopher
Refrigeration
Storage of solidified or liquified gas
Liquified gas transferred as liquid
62 481, F25J 300
Patent
active
057619115
ABSTRACT:
Provided is a novel system and method for delivery of a gas from a liquified state. The system includes: (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn; (b) a gas cylinder cabinet in which the gas cylinder is housed; and (c) means for increasing the heat transfer rate between ambient and the gas cylinder without increasing the gas cylinder temperature above ambient temperature. The apparatus and method allow for the controlled delivery of liquified gases from gas cabinets at high flowrates. Particular applicability is found in the delivery of gases to semiconductor process tools.
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Jurcik Benjamin
Udischas Richard
Wang Hwa-chi
American Air Liquide Inc.
Kilner Christopher
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