Measuring and testing – Fluid pressure gauge – With protective separator
Reexamination Certificate
2006-01-17
2006-01-17
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
With protective separator
C451S005000
Reexamination Certificate
active
06986284
ABSTRACT:
A textured surface characterization system (100) includes a characterization apparatus (110) that contacts a textured surface (104) of an item (108) in order to characterize that surface. The characterization system includes a fluid delivery system (204) for flowing a fluid (128) across the textured surface when the textured surface is in contact with the characterization apparatus. Pressure measurement structures (144, 160) on the characterization apparatus provide pressure data for the fluid as it flows across the textured surface. This pressure data is used to characterize the textured surface.
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Allen Andre
Biederman Blake T.
Lefkowitz Edward
Rohm and Haas Electronic Materials CMP Holdings Inc.
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