Optical: systems and elements – Optical modulator
Reexamination Certificate
2005-11-08
2005-11-08
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
C359S290000, C359S291000, C359S578000, C430S005000, C430S311000, C345S690000, C345S697000, C348S441000, C355S053000, C355S067000, C250S201900, C702S089000
Reexamination Certificate
active
06963434
ABSTRACT:
A method of calculating an aerial image of a spatial light modulator array includes calculating a pixel interference matrix that represents pair wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pixel interference matrix and the effective graytones. The graytones depend only on the modulation states of the pixels. The pixel interference matrix depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pixel interference matrix can be a matrix of functions. The pixel interference matrix can be a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
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ASML Holding N.V.
Ben Loha
Sterne Kessler Goldstein & Fox P.L.L.C.
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