Optical: systems and elements – Optical modulator
Reexamination Certificate
2008-07-01
2008-07-01
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
C359S290000, C359S291000, C359S578000, C430S005000
Reexamination Certificate
active
07394584
ABSTRACT:
A method of calculating an aerial image of a spatial light modulator array includes calculating pair-wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pair-wise interference and the effective graytones. The graytones depend only on the modulation states of the pixels. The pair-wise interference depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pair-wise interference can be represented by a matrix of functions. The pair-wise interference can be represented by a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
REFERENCES:
patent: 5083015 (1992-01-01), Witthoft et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6433874 (2002-08-01), Lindsay et al.
patent: 6522983 (2003-02-01), Dobos et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6775049 (2004-08-01), So
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6804429 (2004-10-01), Yu et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 2002/0122237 (2002-09-01), Sandstrom et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0053143 (2004-03-01), Sandstrom
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: 0 844 529 (1998-05-01), None
patent: 0 844 529 (2000-01-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 03/052516 (2003-06-01), None
ASML Holding N.V.
Ben Loha
Sterne Kessler Goldstein & Fox P.L.L.C.
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