Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-10-30
2007-10-30
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S057000, C700S192000, C438S401000, C438S975000
Reexamination Certificate
active
11209134
ABSTRACT:
A method comprising adjusting a first relative position between a substrate and a fabrication unit by a first shift value, forming a first pattern relative to a first pattern instance on the substrate subsequent to adjusting the first relative position by the first shift value, and calculating a second shift value using a first displacement between the first pattern and the first pattern instance and a second displacement between a second relative position of the first pattern instance with respect to a second pattern instance is provided.
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Gao Jun
Hellekson Ronald A.
Leiser Judson M.
Picciotto Carl E.
Hewlett--Packard Development Company, L.P.
Kosowski Alexander
Picard Leo
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