System and method for azimuth angle calibration

Details System and method for azimuth angle calibration System and method for azimuth angle calibration

2011-08-02

2011-08-02

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

By polarized light examination

Reexamination Certificate

active

07990534

ABSTRACT:
An improved procedure for calibrating the azimuth angle in a metrology module for use in a metrology system that is used for measuring a target on a wafer, and the metrology modules can include oblique Spectroscopic Ellipsometry (SE) and unpolarized or polarized spectroscopic reflectometer devices.

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