Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2007-10-02
2007-10-02
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S077000
Reexamination Certificate
active
11278481
ABSTRACT:
A system and method for automatically mounting a pellicle assembly on a photomask are disclosed. The method includes loading a photomask into a mounting apparatus and loading a pellicle assembly into a back plate of the mounting apparatus opposite the photomask. The back plate includes at least one load cell that measures a force applied by the mounting apparatus to the photomask and the pellicle assembly. The measured force associated with the at least one load cell is received and the pellicle assembly is mounted on the photomask to create a photomask assembly if the measured force is greater than or approximately equal to a minimum force.
REFERENCES:
patent: 2002/0112824 (2002-08-01), Ballard et al.
patent: 2004/0194556 (2004-10-01), Shu et al.
International Search Report and Written Opinion of the International Searching Authority for Application No. PCT/US04/32890 (7 pages), Jul. 7, 2006.
Frye Ethan M.
Griffin Kevin L.
Hendrickson Peter A.
Shepler Jennifer M.
Wiles Bart A.
Baker & Botts L.L.P.
Kim Peter B.
Toppan Photomasks, Inc.
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