Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-12-28
2009-02-10
Nguyen, Ha Tran T (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S765010, C324S1540PB
Reexamination Certificate
active
07489157
ABSTRACT:
Disclosed is a system and method for automatically measuring carrier density distribution by using capacitance-voltage characteristics of a MOS transistor device. System comprises an automatic probe station for measurement of an object wafer, the automatic probe station being electrically connected to the wafer; a capacitor measuring unit having a high frequency terminal and a low frequency terminal; and a control computer for being respectively connected the automatic probe station and the capacitor measuring unit, wherein the high frequency terminal is connected to a gate of the wafer and the low frequency terminal is connected to a substrate of the wafer.
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Dongbu Electronics Co. Ltd.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kusumakar Karen M
Nguyen Ha Tran T
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