System and method for an improved illumination system in a...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Details

C355S071000, C359S224200, C359S290000, C359S872000

Reexamination Certificate

active

11007588

ABSTRACT:
An array of individually controllable elements for use in lithography in which each of the individually controllable elements is comprised of a planar reflector mounted on supports on a substrate by way of elongate hinges.

REFERENCES:
patent: 4954789 (1990-09-01), Sampsell
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6687041 (2004-02-01), Sandstrom
patent: 6728017 (2004-04-01), Park
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6906848 (2005-06-01), Aubuchon
patent: 2002/0114558 (2002-08-01), Nemirovsky
patent: 2003/0169962 (2003-09-01), Rajan et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0069742 (2004-04-01), Pan
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0240033 (2004-12-01), Pan et al.
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0041277 (2005-02-01), Huibers
patent: 2005/0191790 (2005-09-01), Patel et al.
patent: 2006/0056005 (2006-03-01), Patel et al.
patent: 2007/0047113 (2007-03-01), Davis et al.
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None

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