Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-04-08
2008-04-08
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C359S224200, C359S290000, C359S872000
Reexamination Certificate
active
11007588
ABSTRACT:
An array of individually controllable elements for use in lithography in which each of the individually controllable elements is comprised of a planar reflector mounted on supports on a substrate by way of elongate hinges.
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ASML Netherlands B.V.
Rutledge D.
Sterne, Kessler, Goldstein & Fox P.L.L.C
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