Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-04-17
2007-04-17
Paladini, Albert W. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S096000
Reexamination Certificate
active
10624370
ABSTRACT:
A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.
REFERENCES:
patent: 5920392 (1999-07-01), Tsai et al.
patent: 5956523 (1999-09-01), Chen
patent: 6070196 (2000-05-01), Mullen, Jr.
patent: 6208904 (2001-03-01), Mullen, Jr.
patent: 6230080 (2001-05-01), Lee et al.
patent: 6535779 (2003-03-01), Birang et al.
patent: 6535938 (2003-03-01), Teramura et al.
patent: 2004/0139210 (2004-07-01), Lee et al.
patent: 0745489 (1995-02-01), None
patent: 10304008 (1998-02-01), None
Singapore Office Action issued Aug. 7, 2006.
Lee Yuk-Tong
Lin Chun-Ching
Garland Steven R.
Paladini Albert W.
Taiwan Semiconductor Manufacturing Co. Ltd.
LandOfFree
System and method for acquiring semiconductor process status... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for acquiring semiconductor process status..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for acquiring semiconductor process status... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3789114