System and method for a MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S290000

Reexamination Certificate

active

07848004

ABSTRACT:
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 3661461 (1972-05-01), Dessauer
patent: 3679313 (1972-07-01), Rosenberg
patent: 3701586 (1972-10-01), Goetz
patent: 3725868 (1973-04-01), Malmer, Jr. et al.
patent: 3728030 (1973-04-01), Hawes
patent: 4196396 (1980-04-01), Smith
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4392711 (1983-07-01), Moraw et al.
patent: 4441791 (1984-04-01), Hornbeck
patent: 4459182 (1984-07-01), te Velde
patent: 4566935 (1986-01-01), Hornbeck
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4857978 (1989-08-01), Goldburt et al.
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4982184 (1991-01-01), Kirkwood
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5034351 (1991-07-01), Sun et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5062689 (1991-11-01), Koehler
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5091983 (1992-02-01), Lukosz
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5136669 (1992-08-01), Gerdt
patent: 5142414 (1992-08-01), Koehler
patent: 5172262 (1992-12-01), Hornbeck
patent: 5212582 (1993-05-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5255093 (1993-10-01), Topper et al.
patent: 5287215 (1994-02-01), Warde et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5315370 (1994-05-01), Bulow
patent: 5326430 (1994-07-01), Cronin et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5355357 (1994-10-01), Yamamori et al.
patent: 5381232 (1995-01-01), van Wijk
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5396593 (1995-03-01), Mori et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5444566 (1995-08-01), Gale et al.
patent: 5457900 (1995-10-01), Roy et al.
patent: 5488505 (1996-01-01), Engle
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5526327 (1996-06-01), Cordova, Jr.
patent: 5559358 (1996-09-01), Burns et al.
patent: 5561523 (1996-10-01), Blomberg et al.
patent: 5569565 (1996-10-01), Kawakami et al.
patent: 5633652 (1997-05-01), Kanbe et al.
patent: 5677783 (1997-10-01), Bloom et al.
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5835255 (1998-11-01), Miles
patent: 5959763 (1999-09-01), Bozler et al.
patent: 6040937 (2000-03-01), Miles
patent: 6149190 (2000-11-01), Galvin et al.
patent: 6170332 (2001-01-01), MacDonald et al.
patent: ROC 157313 (1991-05-01), None
patent: 0 667 548 (1995-08-01), None
patent: WO 94/28452 (1994-12-01), None
Aratani et al., “Process and Design Considerations for Surface Micromachined Beams for a Tuneable Interferometer Array in Silicon,” Proc. IEEE Microelectromechanical Workshop, Fort Lauderdale, FL, pp. 230-235 (Feb. 1993).
Office Action mailed Aug. 9, 2007 in U.S. Appl. No. 11/390,996.
Office Action dated Jul. 26, 2007 in U.S. Appl. No. 11/564,800.
Office Action mailed Nov. 29, 2005 in U.S. Appl. No. 11/150,682.
Office Action mailed Apr. 18, 2006 in U.S. Appl. No. 11/150,682.
Office Action mailed Oct. 31, 2006 in U.S. Appl. No. 11/150,682.
Office Action mailed Apr. 20, 2007 in U.S. Appl. No. 11/150,682.
Office Action mailed Feb. 28, 2006 in U.S. Appl. No. 11/255,347.
Office Action mailed Sep. 11, 2006 in U.S. Appl. No. 11/255,347.
Office Action dated May 30, 2008, in U.S. Appl. No. 11/492,533.
Office Action mailed Jul. 3, 2002 in U.S. Appl. No. 10/012,092.
Office Action mailed Aug. 27, 2003 in U.S. Appl. No. 10/224,029.
Office Action mailed Feb. 10, 2004 in U.S. Appl. No. 10/224,029.
Office Action mailed Jul. 14, 2004 in U.S. Appl. No. 10/224,029.
Office Action mailed Mar. 24, 2005 in U.S. Appl. No. 10/224,029.
IPER PCT/US01/41341 filed Jul. 10, 2001.
ISR and WO PCT/US01/41341 filed Jul. 10, 2001.
Office Action received Mar. 13, 2006 in R.O.C. App. No. 91105559.
Office Action dated Dec. 26, 2008, in U.S. Appl. No. 11/492,533.
Office Action dated Dec. 10, 2009, in U.S. Appl. No. 11/492,533.
Office Action dated Feb. 19, 2010 in U.S. Appl. No. 12/336,357.
Office Action dated Feb. 17, 2009 in U.S. Appl. No. 11/584,425.
Office Action dated Apr. 15, 2009, in U.S. Appl. No. 11/492,533.
Office Action dated Apr. 22, 2010 in U.S. Appl. No. 12/360,005.
Notice of Reasons for Rejection received Jul. 9, 2010 in Japanese App. No. 2003-512759.

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