System and method for a mass flow controller

Details System and method for a mass flow controller System and method for a mass flow controller

2005-11-08

2005-11-08

Krishnamurthy, Ramesh (Department: 3753)

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

C137S486000, C137S487500, C700S029000, C700S037000, C700S282000, C702S045000, C702S100000

Reexamination Certificate

active

06962164

ABSTRACT:
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.

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