Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-10-31
2006-10-31
Rose, Robert A. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S443000, C451S056000
Reexamination Certificate
active
07128637
ABSTRACT:
A system and method adapted to detect a malfunction related to a pad conditioner in a polishing apparatus are disclosed. The pad conditioner includes a conditioning pad seated on a conditioner head and a drive motor rotating the conditioner head. The system also comprises a current sensor connected to the drive motor, adapted to detect electrical current drawn by the drive motor, and provide a corresponding current value, a Personal Computer (PC) receiving the current value, adapted to compare the received current value to first and second reference values, and generate a drive indication signal in response to the comparison, and a main controller receiving the drive indication signal and adapted to generate an interlock signal halting operation of the polishing apparatus in response to the drive indication signal.
REFERENCES:
patent: 5833519 (1998-11-01), Moore
patent: 5904608 (1999-05-01), Watanabe
patent: 5975994 (1999-11-01), Sandhu et al.
patent: 6695680 (2004-02-01), Choi et al.
patent: 6953382 (2005-10-01), Korovin et al.
Kim Hyeung-Yeul
Kim Sung-Hwan
Rose Robert A.
Volentine Francos & Whitt PLLC
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